| http://www.w3.org/ns/prov#value | - Micro-sensor 305 may monitor such exemplary attributes of the internal environment of the wafer carrier such temperature, pressure, humidity, particulate count, the presence of specific materials such as oxygen, hydrogen, chlorine and fluorine or other elemental gases, chemical gases such as ammonia, water vapor, hydrogen fluoride, hydrogen chloride, nitrogen oxides, silanes and solvents such as a
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