About: http://webisa.webdatacommons.org/255406500

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Selection of the sputtering conditions, including the gas pressure, rf power, and kind of gas, can control the internal stress, crystallization grain size, amorphous state, and the like.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com