About: http://webisa.webdatacommons.org/25567018

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 16 is a flowchart for identification of wafer pollution when pollution other than erosion or recoiling is predicted by the steps shown in FIG. 15,
http://www.w3.org/ns/prov#wasQuotedFrom	google.com