About: http://webisa.webdatacommons.org/256353415

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIGS. 12A and 12B are a cross sectional view and a plan view showing the appearance of the photoresist wherein a box-in-box pattern is formed;
http://www.w3.org/ns/prov#wasQuotedFrom	google.com