About: http://webisa.webdatacommons.org/25690220

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 8 is a flowchart for explaining the schematic processing flow of a pre-alignment process in a pre-alignment image processing apparatus 8 and the semiconductor exposure apparatus using the pre-alignment image processing apparatus;
http://www.w3.org/ns/prov#wasQuotedFrom	google.com