About: http://webisa.webdatacommons.org/256969497

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In order to solve such a problem, there is a method for wet etching in an inert gas, such as nitrogen (N2), to lower the oxygen content to a predetermined value or below.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com