| http://www.w3.org/ns/prov#value | - In a preferred embodiment, the process of the invention can be used to etch openings which are 0.30 ??m, especially 0.25 ??m or smaller sized openings using a fluorocarbon reactant which comprises CxFyHz wherein x is 1 to 5, y is 1 to 8 and z is 0 to 3.
|
