About: http://webisa.webdatacommons.org/257124072

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In one embodiment of the present invention, the above structure is encapsulated by depositing a metal such as Ta, TaN, TiN and the like onto the surface of the structure.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es