About: http://webisa.webdatacommons.org/257178269

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In other embodiments, a lens arrangement or other components may be included to direct the optical beams 1004 and 1006 to a coincident target point on the substrate 1002.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es