| http://www.w3.org/ns/prov#value | - FIG. 11 is a graph diagrammatically illustrating the sequential supply of the process gases consisting of the processes of injecting and purging the source gases, injecting the radicals of the reactant gases, and purging the reactant gases while maintaining a more stable pressure of the chamber during supply of the source gases and the reactant gases in the chemical vapor deposition apparatus acco
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