PropertyValue
http://www.w3.org/1999/02/22-rdf-syntax-ns#type
http://www.w3.org/ns/prov#value
  • Referring to FIG. 2, in step 202, a first manufacturing process is performed on a semiconductor wafer, wherein the first manufacturing process includes a deposition process, a photolithography process, an etching process, a planarization process or other process.
http://www.w3.org/ns/prov#wasQuotedFrom
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