About: http://webisa.webdatacommons.org/257522064

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Next, as shown in FIG. 5(f), a silicon nitride layer 11 of a thickness of, e.g. 20 nm, is formed.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com