About: http://webisa.webdatacommons.org/257535789

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Next, with the object of removing mainly dry etching products, the substrate is cleaned with a first cleaning solution containing of hydrofluoric acid (the step of first cleaning).
http://www.w3.org/ns/prov#wasQuotedFrom	google.com