About: http://webisa.webdatacommons.org/257886539

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 5 is a plan view showing the general structure of the thin-film formation apparatus, and FIG. 6 is an enlarged side view showing a portion of the thin-film formation apparatus shown in FIG. 5.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com