About: http://webisa.webdatacommons.org/257959312

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 3 is a flow chart showing a step-and-repeat alignment and exposure operation made in the apparatus of FIG. 2.
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr