About: http://webisa.webdatacommons.org/258194634

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 3A is a schematic side cross-sectional view of the microfeature workpiece including a coating extending across the workpiece.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com