| http://www.w3.org/ns/prov#value | - 20090211610METHOD FOR TREATING A SUBSTRATE - Disclosed herein is a method for treating a substrate wherein a chemical is fed to a surface of the substrate, the method including the steps of: initially feeding a liquid whose electric conductivity is lower than the chemical to a surface of the substrate so as to wet at least a region where the chemical is to be discharged, and discharging the chemic
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