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Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 3 is a flow chart showing an overview of the steps required to determine if a defect that was detected by a photomask inspection tool will adversely affect the wafer, in accordance with the present invention;
http://www.w3.org/ns/prov#wasQuotedFrom	patents.com