About: http://webisa.webdatacommons.org/258376394

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 1 is a schematic partial cross sectional view illustrating an array of M???N thin film actuated mirrors previously disclosed;
http://www.w3.org/ns/prov#wasQuotedFrom	google.com