About: http://webisa.webdatacommons.org/258412530

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 21A is a side view of an alternative embodiment of a nozzle depositing reactants in a reaction zone near a substrate surface.
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr