About: http://webisa.webdatacommons.org/258481213

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	by dipping, spraying, spin coating, or other methods conventional in the photoresist art.
http://www.w3.org/ns/prov#wasQuotedFrom	patents.com