About: http://webisa.webdatacommons.org/258518350

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	photolithographic method in order to leave the upper electrode 14 only on the polyimide film 13.In FIG. 9g, metals such as titanium and gold are consecutively formed on the insulating film 17 and the upper electrode 14.
http://www.w3.org/ns/prov#wasQuotedFrom	patentgenius.com