About: http://webisa.webdatacommons.org/2588944

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Cx Ny where the amount of nitrogen is about 10 at. % to 20 at. %, by providing a magnetron sputter apparatus including a vacuum chamber and incorporating therein a carbon target and a magnetic recording medium deposition substrate.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es