| http://www.w3.org/ns/prov#value | - Since the electrode plate of the lower electrode 340 is set facing opposite the electrode plate Tu of the upper electrode 350 as well as the substrate such as the wafer Tw, the temperatures or the thicknesses of the electrode plate Tu at the upper electrode 350, the wafer Tw and the electrode plate at the lower electrode 340 can be measured all at once by adopting any of the structures achieved in
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