About: http://webisa.webdatacommons.org/259395753

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	With remote microwave plasma system 55 of present invention, native oxides or other oxides may be etched and plasma damage to the wafer is avoided.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au