About: http://webisa.webdatacommons.org/2595487

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Oxygen, in the form of O2, N2O, or other gas or gas mixture having a large amount of available oxygen is fed into a remote plasma chamber (such as remote plasma chamber 40, for example) and a plasma is generated for an RPO process.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es