| http://www.w3.org/ns/prov#value | - FIG. 17A is a view of explanatory showing a drive vibration mode, FIG. 17B is a view of explanatory showing a detection vibration mode, FIG. 18A is a diagram showing the dielectric polarization direction of the piezoelectric material, such as piezoelectric ceramic, and the configuration of the electrodes, and FIG. 18B is a cross sectional view taken along line XVIII--XVIII of FIG. 16 and showing a
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