About: http://webisa.webdatacommons.org/259586232

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Silicon is the most preferred material for the substrate layer, since silicon micromachining is well known and can be used to fabricate, with precise dimensional precision, a bearing well and possibly other configuration features.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es