About: http://webisa.webdatacommons.org/259638225

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	With scaling down of semiconductor device, not only circuit elements such as of transistors but also interconnection wirings are being scaled down.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com