About: http://webisa.webdatacommons.org/259794986

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 9 is a drawing which shows variation of the pre-processing unit to be included in the substrate processing apparatus related to the invention.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com