About: http://webisa.webdatacommons.org/259801955

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	With a dual damascene process, vias and trenches are simultaneously filled with conductive materials such as aluminum, tungsten, copper and alloys.
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr