About: http://webisa.webdatacommons.org/260209541

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	ist, metal oxides, CMP residue, and the like, from semiconductor wafers or other substrates.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com