| http://www.w3.org/ns/prov#value | - ight of hydrogen, and containing therein dopants such as boron or aluminum in an amount of from about 0.5 parts per million to about 10 parts per million; a first overcoating layer of silicon nitride with from about 5 atomic percent of nitrogen to about 33 atomic percent of nitrogen, and from about 95 atomic perent of silicon to about 67 atomic percent of silicon; and thereover a second top overco
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