About: http://webisa.webdatacommons.org/260337473

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 2 is a schematic illustration showing an approximate magnified cross-sectional view of a wafer which is treated by using the gas plasma processing system shown in FIG. 1;
http://www.w3.org/ns/prov#wasQuotedFrom	patents.com