About: http://webisa.webdatacommons.org/260407078

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 7 is a flow chart showing the flow of a pattern formation method according to the second embodiment of the present invention when part of a unit process group is changed.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com