About: http://webisa.webdatacommons.org/260656255

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	A third opening 136 is formed at a position over the capacitor structure 150 through the second insulating layer 130 and the double hydrogen barrier layer 142 by using a method such as photolithography and plasma etching.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com