About: http://webisa.webdatacommons.org/260835655

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	A gate oxide other than SiO2 may also be described electrically in terms of an EOT. In this case, the theoretical oxide referred to in the EOT number is an equivalent SiO2 oxide layer.
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr