About: http://webisa.webdatacommons.org/260873872

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Typical defects include particles, flakes, bumps, pits, voids, recesses, scratches and other irregularities or undesirable features that can exist in or on wafers.
http://www.w3.org/ns/prov#wasQuotedFrom	google.co.uk