About: http://webisa.webdatacommons.org/260966086

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	For example, vacuum chucks, mechanical clamping, and other means of securing a wafer to a chuck could be used, as would be apparent to one skilled in the relevant art(s).
http://www.w3.org/ns/prov#wasQuotedFrom	google.com