About: http://webisa.webdatacommons.org/261121412

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	However, any suitable material may be used for the adhesion layer, for example, tungsten-nitride, tungsten-tantalum, tantalum silicon nitride, or other ternary compounds.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es