About: http://webisa.webdatacommons.org/261768853

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	While silicon nitride is described, it is understood that other insulating layers, such as silicon oxide are suitable for use.
http://www.w3.org/ns/prov#wasQuotedFrom	google.ca