About: http://webisa.webdatacommons.org/261942322

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The present invention relates to a semiconductor device, and more particularly to a semiconductor device having a silicon on insulator (SOI) structure and an insulated isolation region of a U-groove structure.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com