| http://www.w3.org/ns/prov#value | - The microfabricated biosensor of claim 1 in which said permselective layer comprises a heat-treated film of a silane compound having the formula R'n Si(OR)4-n, in which n is an integer selected from the group consisting of 0, 1, and 2; R' is a hydrocarbon radical comprising 3-12 carbon atoms; and R is a hydrogen radical or a lower alkyl radical comprising 1-4 carbon atoms.
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