About: http://webisa.webdatacommons.org/262071593

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The pad layer 103 may be formed by any method by those of ordinary skill in the art any deposition method, such as sputtering.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com