| http://www.w3.org/ns/prov#value | - ion including a first resistance;an insulating film formed on the epitaxial layer;a pad electrode formed on the insulating film and located above the first region; anda resistor layer, formed on the insulating film and located above the second region, one end of the resistor layer being connected to the first region through said insulating film and another end of the resistor layer being connected
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