About: http://webisa.webdatacommons.org/262316840

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The method may be particularly useful when the first layer contains a metal other than Ta and the second layer contains Ta2O5.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com