About: http://webisa.webdatacommons.org/262321961

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The following is a description of a fifth embodiment of a heat treatment apparatus using the present invention, and which is suitable for performing oxidation and diffusion processing for semiconductor wafers.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com