About: http://webisa.webdatacommons.org/262335511

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Therefore, it is desirable that film forming be performed by using mainly particles flying to the substrate surface in the direction perpendicular to substrate surface during film forming of the magnetic film.
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr