About: http://webisa.webdatacommons.org/262399686

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	When the inorganic insulating film mainly containing silicon and nitrogen is formed by sputtering, a target mainly containing
http://www.w3.org/ns/prov#wasQuotedFrom	google.com