About: http://webisa.webdatacommons.org/262577170

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The silicon nitride is deposited on over the structure, using techniques such as chemical vapor deposition (CVD) and the like.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com